This case study demonstrates how Flownex was used to simulate a Nitrous oxide (N2O) delivery system for semiconductor fabrication, ensuring stable flow rates, preventing condensation and icing, and optimizing heater configurations. Flownex enabled detailed analysis of temperature profiles and flow behavior, helping CollabraTech Solutions maintain vaporization and avoid costly prototypes.
CHALLENGE
CollabraTech Solutions developed an N2O autocross delivery system for semiconductor fabrication and needed to confirm that the system could maintain the specified flow rate in standard litters per minute (SLPM). Engineers also needed to ensure the process fluid remained fully vaporized during delivery and to assess potential external icing on the system.
BENEFITS
Flownex allowed CollabraTech to simulate conjugate heat transfer throughout the delivery system, providing engineers with detailed insight into temperature profiles, flow behaviour, and heat requirements. This enabled identification of areas needing heating to prevent condensation and surface icing without relying on costly physical prototypes.
SOLUTION
Using Flownex, the delivery system was modelled under multiple operating scenarios. The simulation revealed regions where gas exit temperatures were unnecessarily high and provided guidance for optimizing heater placement and configuration. These insights allowed the team to maintain target SLPM flow rates, ensure the fluid stayed fully vaporized, and prevent exterior icing during operation.